ASHRAE DESIGN GUIDE for CLEANROOMS
Fundamentals Systems andPerformance
ASHRAE DESIGNGUIDE for CLEANROOMS
Thispublication was prepared under the auspices of ASHRAE Technical Committee 9.11 CleanSpaces.
Updates and errata for this publication will be posted on the ASHRAEwebsite at
SH wy eey regpeguedtegowai rgule y Na1far Ressls 05/13/2920 09o45.02: hf5T AIRFORCE DW/7IEMNS86100
ASHRAE DESIGNGUIDE for CLEANROOMS
Fundamentals Systems and Performance
Atlanta
1791 Tullie Circle NE 0 2017 ASHRAEAtlanta GA 30329All rights reserved.
Cover design by Megan Joyce
ASHRAE is a registered trademark in the U.S. Patent and Trademark Office owned by the American Society of Heat-ing Refrigerating and Air-Conditioning Engineers Inc.
claims any duty to investigate any product service process procedure design or the like that may be described s ss H p nou s HS q d s s herein. The appearance of any technical data or editorial material in this publication does not constitute endorsement warrant that the information in the publication is free of errors and ASHRAE does not necessarily agree with any warranty or guaranty by SHRAE of any produt servic process proceure design or the like.ASHRAE does ntstatement or opinion in this publication. The entire risk of the use of any information in this publication is asumed by the user.
No part of this publication may be reproduced without permission in writing from ASHRAE except by a reviewerwhomaqtbripasaeuilatoeviwwipriatreitmaaya ftispublication be reproduced stored in a retrieval system or transmitted in any way or by any meanselectronic pho- tocopying recording or otherwithout permission in writing from ASHRAE. Requests for permission should besubmited at
Library of Congress Cataloging-in-Publication Data
Names: ASHRAE (Firm) author. Title: ASHRAE design guide for cleanrooms : fundamentals systems andperformance.Other titles: Design guide for cleanrooms Description: Atlanta : ASHRAE 2017. | Includes bibliographical referencesand index.Identifiers: LCCN 2017020775| ISBN 9781939200440 (hardcover : alk. paper) 1 ISBN 9781939200457 (PDF)Subjects: LCSH: Clean rooms.Clasifiation: LCC TH7694 A76 2017 I DC 620.8/6-dc23 LC record avalable at
