ISO 14644-2 2015 ed2 洁净室及相关受控环境 第二部分 监测以提供与空气清洁度相关的洁净室性能证据、通过颗粒浓度进行评估(英文版).pdf

14644,2015,ed2,ISO,洁净室,国外及港澳台标准
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INTERNATIONAL STANDARD

environments- Cleanroomsandassociatedcontrolled

Part 2: Monitoringtoprovideevidenceof cleanroomperformancerelatedtoair cleanlinessbyparticleconcentration

Salles propres et environnements maitrises apparentes - Partie 2: Surveillonce du maintien des performances de la salle proprepour la proprete particulaire de Iair

ISO 14644-2:2015(E)

COPYRIGHTPROTECTEDDOCUMENT

ISO 2015 Published in Switzerland

or by anymsletronic r mehnical nclding phtooyingrting n thtet orintranet witout prr All rights reserved. Unless otherwise specified no part of this publication may be reproduced or utilized otherwise in any formwritten permission. Permission can be roquested from either ISO at the address below or ISO's member body in the country of the requester.

ISO copyriglht office Ch. de Blandonnet 8 ▪ CP 401 CH-1214 Vernier Geneva SwitzerlandTel 41 22 749 01 11 Fax 41 22 749 09 47oos@udoo

Contents

Foreword ivIntroduction.2 1 adoos Normative references. 13 Terms and definitions. 1 14 Creating implementing and maintaining a monitoring plan. 24.1 4.2 Risk assessment. Principle. 2 24.3 4.4 Monitoring plan.. Calibration. 3 34.6 4.5 Review and approval Response to a deviation during monitoring 4 45 Periodic classification of air cleanliness by particle concentration 4Annex A (informative) Matters to consider when developing a monitoring plan. 5Bibliography. Annex B (informative) Considerations for setting alert and action levels. 14 9

ISO 14644-2:2015(E)

Foreword

ISO (the International Organization for Standardization) isa worldwide federation of national standardsbodies (ISO member bodies). The work of preparing International Standards is normally carried outmittee has been established has the right to be represented on that mittee. International organizations governmental and non-governmental in liaison with ISO also take part in the work.ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.

The procedures used to develop this document and those intended for its further maintenance aredescribed in the ISO/IEC DirectivesPart 1.In particular the different approval criteria needed for theeditorial rules of the ISO/1EC Directives Part 2 (see

patent rights.ISO shall not e heldresponsible for identifying any or all such patent rightsDetails of Attention is drawn to the possibility that some of the elements of this document may be the subject ofon the ISo list of patent declarations received (see

Any trade name used in this document is information given for the convenience of users and does notconstitute an endorsement.

For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment as well as information about ISO's adherence to the WTO principles in the TechnicalBarriers to Trade (TBT) see the following URL: Foreword - Supplementary information

The mittee responsible for this document is ISO/TC 209 Cleanrooms and associated controlled environments.

This second edition cancels and replaces the first edition (ISO 14644-2:2000) which has beentechnically revised throughout.

ISO 14644 consists of the following parts under the general title Cleonrooms and associated controlled

-Part 1: Classification of air cleanliness by particle concentrationPart 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particleconcentration--Part 7: Separative devices (clean air hoods gloveboxes isolators and mini-environments)Pairt 8: Classification of air cleanliness by chemical concentration (ACC)-Part 9: Classificotion of surface cleanliness by particle concentration

-Part 3: Test methods

Part 4: Design construction and start-up

-Part 5: Operations

-Part 10: Classification of surface cleanliness by chemical concentration

Attention is also drawn to ISO 14698 Cleanrooms and associated controlled environments -Bio-contamination control:

- Part 1: General principles and methods-Part 2: Evoluation and interpretation of bio-contamination data

Introduction

This revision of ISO 14644-2 emphasizes the need to consider a monitoring strategy in addition tothe initial or periodic execution of the classification of a cleanroom or clean zone in accordance with ISO 14644-1:2015 5.1.The monitoring activity provides a continuing flow of data over time therebyproviding a more detailed view of the performance of the installation.

Potential benefits gained from monitoring are

- faster response to adverse events and conditions -- integration of data from multiple instruments - ability to develop trends from data over time enhanced knowledge of installation and process which allows for more effective risk assessment and- improved control of operational costs and product losses.

ISO 14644-2 specifies the requirements of a monitoring plan based on risk assessment of the intendeduse. The data obtained provide evidence of cleanroom or clean zone performance related to air cleanliness by particle concentration.

In some circumstances relevant regulatoryagenciesmayimpose supplementarypolicies requirementsrequired. After a monitoring plan is initially established and implemented it may be necessary to or restrictions. In such situations appropriate adaptations of the monitoring procedures may berevise the plan when significant changes are made to the installation or process requirements. It is also prudent to conduct periodic reviews of a monitoring plan based on data obtained and experience in use.

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